- 720x720x600 µm
- Size 60x60x52 mm
| Product-Number | C3O-L00600 | C3S-D00600 | Unit |
| Position-Sensor | – | SGS | |
| Range (-45..180 V) | 900x900x600 | 900x900x600 | µm |
| Range, closed loop | – | 600x600x500 | µm |
| Resolution, open loop | 4 | 4 | nm |
| Resolution, closed loop | – | 6 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability, closed loop | – | 50 | nm |
| Load | 200 | g | |
| Push/Pull | 50/20 | N | |
| Stiffness | 0.15 | N/µm | |
| Lowest Resonances, unloaded | 190/145/130 | Hz | |
| El. Capacitance @ 1V eff. 1kHz | 4.4/axis | µF | |
| Body-Material | aluminum, stainless steel | ||
| Dimensions | 60x60x52 | mm | |
| Wire-Length | 1.5 | m | |
| Connectors | Lemosa | DSub15 | |
| Operating Temperature | -20.. 80 | °C | |
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