{"id":1227,"date":"2025-03-05T15:37:15","date_gmt":"2025-03-05T14:37:15","guid":{"rendered":"https:\/\/nanofaktur.com\/?page_id=1227"},"modified":"2026-04-30T13:53:04","modified_gmt":"2026-04-30T11:53:04","slug":"applications","status":"publish","type":"page","link":"https:\/\/nanofaktur.com\/en\/applications\/","title":{"rendered":"Applications"},"content":{"rendered":"\r\n
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Applications<\/h1>\n

Our piezo drives deliver resolutions down to the sub-nanometer level. Piezo actuators can also be very fast. Accordingly, our products are used in applications that require either extreme precision or high dynamics.<\/p>\n<\/div> <\/div>\r\n <\/div>\r\n <\/div>\r\n \r\n <\/section>\r\n\n\n\r\n\r\n

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  • \r\n Quantum Technologies<\/span>\r\n <\/li>\r\n
  • \r\n Surface-Inspection<\/span>\r\n <\/li>\r\n
  • \r\n Optical Trapping<\/span>\r\n <\/li>\r\n
  • \r\n Disc-Drive-Test<\/span>\r\n <\/li>\r\n
  • \r\n Lithography<\/span>\r\n <\/li>\r\n
  • \r\n Nano-Indentation<\/span>\r\n <\/li>\r\n
  • \r\n Inspection-Systems<\/span>\r\n <\/li>\r\n
  • \r\n Pixel-Interpolation<\/span>\r\n <\/li>\r\n
  • \r\n Nano-Alignment<\/span>\r\n <\/li>\r\n
  • \r\n SEM<\/span>\r\n <\/li>\r\n
  • \r\n Sample-Scanning<\/span>\r\n <\/li>\r\n
  • \r\n White-Light-Interferometers<\/span>\r\n <\/li>\r\n
  • \r\n Interferometry<\/span>\r\n <\/li>\r\n
  • \r\n Semi-Conductor<\/span>\r\n <\/li>\r\n
  • \r\n Dispensing<\/span>\r\n <\/li>\r\n
  • \r\n Wafer-Stages<\/span>\r\n <\/li>\r\n
  • \r\n Dithering<\/span>\r\n <\/li>\r\n
  • \r\n Beam-Steering<\/span>\r\n <\/li>\r\n
  • \r\n AFM<\/span>\r\n <\/li>\r\n
  • \r\n Z-Stacking<\/span>\r\n <\/li>\r\n
  • \r\n Autofocus<\/span>\r\n <\/li>\r\n <\/ul>\r\n <\/div>\r\n <\/div>\r\n <\/div>\r\n <\/div>\r\n<\/section>\r\n\n\n\r\n\r\n
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    Wafer-Inspection and Hybrid Bonding<\/strong><\/h2>\n

    In semiconductor-industries, absolute positioning accuracy<\/strong> and stability in the nanometer-magnitude<\/strong> are decisive.<\/p>\n

    Most exact adjustment of the wafers and optical focussing at stability for several minutes is required for methods and processes like hybrid bonding, wafer2wafer, wafer2die bonding in maskless lithography (direct imaging<\/strong>), wafer-inspection<\/strong>, metrological applications<\/strong>, advanced packaging<\/strong>,<\/p>\n

    Our piezo-driven nano-positioning<\/strong> systems grant positioning of wafers and optics at absolute accuracy, which other techniques cannot reach by far<\/strong>. Each step in the process runs repeatably and safely<\/strong> \u2013 with resolution of less than nanometers.<\/p>\n

     <\/p>\n

    Recommended products: L3x-D10300-XY300Z100<\/strong> and SFC-D20400<\/strong><\/p>\n <\/div>\r\n <\/div>\r\n

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    Electro-optical wafer-probing in production of PICs and silicon photonics<\/strong><\/h2>\n

    In the production of photonic integrated circuits (PICs)<\/strong> the time<\/strong> for the adjustment and test of the silicon-photonic components mostly determines efficiency and costs<\/strong>.<\/p>\n

    The piezo-driven positioning-systems of nanoFaktur deliver nanometer-resolution, high dynamics and playless motion. Thus, optical fibres, wave-guides and chips are being adjusted much faster and more precise<\/strong>, than classic drives can.<\/p>\n

    In combination with the search\/align routines<\/strong> in the firmware of our controllers, throughput<\/strong> and repeatabilty are being raised. A fully automated production is possible. Our piezo-solutions secure scalability<\/strong>, higher yield <\/strong>and lower costs<\/strong> per unit, which are the base for economic mass-production of silicon-photonic parts and PICs.<\/p>\n

    Advantages:<\/strong><\/p>\n

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    • nanometer-precise and wearless positioning of fibres, wave-guides and chips<\/li>\n
    • dynamic scanning and intelligent algorithms for minimized process-time and maximized throughput<\/li>\n
    • perfect integration into test- and production-setups<\/li>\n
    • <\/li>\n<\/ul>\n

      Recommended Products:<\/strong> C3S-D00100; C3S-D00600<\/strong><\/p>\n <\/div>\r\n <\/div>\r\n

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      White Light Interferometry (WLI):<\/h2>\n

      Piezo Systems are ideal tools for WLI, because they<\/p>\n

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      • offer positioning accuracies of nanometer-magnitude,<\/li>\n
      • can be compact,<\/li>\n
      • are free of wear and do not need service.<\/li>\n<\/ul>\n

        Recommended products: L1C-D00300, SFC-D20400, EBC-060310<\/strong><\/p>\n <\/div>\r\n <\/div>\r\n

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        Diagnostics and Cell-Analysis\u00a0<\/strong><\/h2>\n

        In diagnostics of cancer, the analysis of cells and sequencing of genome<\/strong> require spectroscopic metrology with positioning accuracy<\/strong> in the sub-micron magnitude.<\/p>\n

        Our compact piezo-systems offer quick and stable<\/strong> movements a minimum space<\/strong> and zero particle emission<\/strong>. Thus, metrology is becoming more reliable<\/strong>, throughput<\/strong> maximized. Processes in production and lab run more efficiently<\/strong>.<\/p>\n

        \u00a0<\/strong><\/p>\n

        Advantages:<\/strong><\/p>\n

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        • Quicker analysis and higher capacity<\/li>\n
        • More precise results for reliable data.<\/li>\n
        • Space-saving integration<\/li>\n<\/ul>\n

          Recommended products:<\/strong> SFC-D20400, SFS-D10100<\/strong><\/p>\n <\/div>\r\n <\/div>\r\n

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          High Resolution Microscopy\u00a0<\/strong><\/h2>\n

          In typical high resolution microscopy applications Z-stacks<\/strong> are being recorded, this means hundreds of level-images of the samples. These allow for generation of 3D-models<\/strong> of cell-cultures, enzymes, DNA or other biological specimen.<\/p>\n

          Our positioning-systems offer nanometer-precise positioning and repeatability<\/strong>. They allow for moving probes, samples or focus-positions at superior accuracy.<\/p>\n

          Thanks to real-time interfaces and inputs\/outputs for trigger signals, cameras or other probes can be easily synchronized. This is especially relevant for confocal 3D-fluorescence imaging<\/strong>, super-resolution microscopy (STED, PALM, SIM)<\/strong> or live-cell imaging with high resolution of time and space.<\/p>\n

          Advantages:<\/strong><\/p>\n

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          • nanometer precise z-positioning<\/li>\n
          • stability for minutes<\/li>\n
          • flexible motion of probes, lenses or samples<\/li>\n
          • optimum integration into microscopy-setups (custom designs)<\/li>\n<\/ul>\n

            Recommended products: SFC-D20400, SPS-D00600, EBx-060310<\/strong><\/p>\n <\/div>\r\n <\/div>\r\n

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