C3a CUBE XYZ-Stages, 250 µm

  • >300x300x300 µm
  • Size 40x40x44 mm
  • non-mag availbl.
Product-Number C3O-L00250 C3S-D00250 Unit
Position-Sensor SGS
Displacement (0..150 V) 185 185 µm
Displacement (-45..180 V) 295 295 µm
Displacement, closed loop 250 µm
Resolution, open loop 1 1 nm
Resolution, closed loop 1.5 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 25 nm
Systematic Crosstalk 900 nm
Push/Pull 15/10 N
Stiffness 0.4 N/µm
Lowest Resonance, unloaded 210 Hz
Lowest Resonance, w/ load 30g 190 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel
Dimensions 40x40x44.6 mm
Mass 230 g
Wire-Length 1.5 m
3 Connectors Lemosa DSub
Operating Temperature -20..80 °C

Options

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Drivers, open-loop, EBO-060100
  • Suitable Controller, closed-loop, EBD-060330

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