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LP_ X/Z-Stages, 100-1000µm

LPC/LPS are small linear-stages with large travel-ranges. The guidance is optimized – especially if the front-side platforms are used. LPS come with strain-sensors, LPC with capacitive sensors for highest accuracy.

  • 100/300/600/1000 µm
  • compact
  • 2 platforms
Categories: Nano-Positioning, Piezo-Stages 1D-2D-3D, X-Stages
Product-Number LP_-D00100 LP_-D00300 LP_-D00600 LP_-D01000 Unit
Displacement, closed-loop 100 300 600 1000 µm
Resolution, LPC

Resolution, LPS

 0.5

1.5

 1.5

5

 3.0

9

 5

15

 nm
Linearity, LPC

Linearity, LPS

 0.02

0.2

 %
Repeatability, LPC

Repeatability, LPS

 5

10

 10

25

 20

70

 30

100

 nm
Pitch/Yaw ±3 ±3 ±6 ±10 µrad
Load 1 kg
Push/Pull 50/20 30/10 N
Stiffness 1.6 0.3 0.15 0.15 N/µm
Resonance, unloaded 900 425 225 200 Hz
El. Capacitance @ 1V eff. 1kHz 2.2 3.3 4.4 7.7 µF
Body/Platform-Material stainless steel/aluminum
Operating Temperature -20..80 °C

Options

  • Vacuum-Compatibility
  • Suitable controller for LPC: EBC-120310
  • Suitable controller for LPS: EBD-060310

Downloads

Datasheet Drawing
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