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L2C XY-Stage, 100µm, Aperture

L2C-D10100 is a high-dynamic XY scanning stage. It is equipped with capacitive position-sensors for top-precision. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. These XY stages are also available with integrated Z-axes and there are long-range versions.

  • 100 µm
  • capacitive sensors
  • large aperture
  • high-dynamics
Categories: Nano-Positioning, Piezo-Stages 1D-2D-3D, XY-Stages
Product-Number L2C-D10100 Unit
Position-Sensors Capacitive (Cap)
Ranges XY, closed loop 100×100 µm
Resolution, closed loop 0.5 nm
Linearity, closed loop 0.02 %
Repeatability 5 nm
Resonance, unloaded 1100 Hz
Resonance, w/ 2.5 kg payload 500 Hz
Load 3 Kg
Push/Pull, in Z 50/20 N
El. Capacitance @ 1Veff 1kHz 13.2 µF
Body/Platform-Material Aluminum, black
Weight 1 kg
Operating Temperature -20.. 80 °C
Connector DSub25
Cable length 1.5 mm

Options

  • Vacuum compatibility, and/or non-magnetic
  • Suitable controller , EBC-120320

Downloads

Datasheet Drawing
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