- 100/400/800 µm
- straight guided
- capacitive or strain sensors
| Product-Code | SFC-D20100 | SFC-D20400 | SFC-D20800 | Unit |
| Range, Closed Loop | 100 | 400 | 800 | µm |
| Range, Open Loop (-45..180 V) | 120 | 480 | 960 | µm |
| Resolution | 0.5 | 2 | 4 | nm |
| Linearity, SFC | 0.02 | % | ||
| Pitch/Yaw | 10 | 30 | 60 | µrad |
| Repeatability, SFC | 10 | 30 | 50 | nm |
| Push/Pull | 15/20 | 15/20 | 10/20 | N |
| Stiffness | 0.5 | 0.25 | 0.09 | N/µm |
| Resonance, unloaded | 680 | 400 | 230 | Hz |
| Electrical Cap. @ 1V eff, 1kHz | 1.1 | 3.3 | 6.6 | µF |
| Body-Material | aluminum/stainless-steel | |||
| Operating Temperature | -20..80 | °C | ||
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