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SPS Sample Z-Stages

SPS-Stages for specimen are available with two different ranges: 150and 600 µm. The low height of only 15 mm makes handling easy under the microscope. The aperture is as large as 142 x 110 mm and can bear the optional sample and petri-dish holders.

  • Z Sample-Stages
  • 150/600 µm
  • opt. sample holders
Categories: Microscopy, Nano-Positioning, Piezo-Stages 1D-2D-3D, Sample Stages, Z-Stages
Product-Number SPS-D00150 SPS-D00600 Unit
Displacement Sensor Strain-Gage
Displacement, closed loop 150 600 µm
Displacement (-45..180 V) 180 720 µm
Resolution, closed loop 1.5 6 nm
Linearity, closed loop 0.2% %
Repeatability, closed loop 15 60 nm
Push/Pull 50/20 50/20 N
Resonance, unloaded 380 250 Hz
Resonance, 125g load 270 180 Hz
Resonance, 250g load 220 145 Hz
El. Capacitance @ 1V eff. 1kHz 4.4 13.2 µF
Electrical Connection DSub15(m)
Dimensions, L x W x H 237 x 156 x 15 mm
Aperture, L x W 142 x 110 mm
Body-Material aluminum, black anodized
Operating Temperature -20..+80 °C

Options

  • Vacuum-Compatibility
  • Suitable Driver, open-loop, EBO-060100
  • Suitable Controller, closed-loop, EBD-060310

Downloads

Datasheet Drawing
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