C2a XY-Stages, 100 µm

  • >100×100 µm
  • Stiff and dynamic
  • Size 40x40x30 mm
Product-Number C2O-L00100 C2S-D00100 Unit
Position-Sensor SGS
Range (-45..180 V) 120×120 120×120 µm
Range, closed loop 100×100 µm
Resolution, open loop 0.5 0.5 nm
Resolution, closed loop 1 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 10 nm
Systematic Crosstalk 200 nm
Load 500 g
Push/Pull 15/10 N
Stiffness 1.5 N/µm
Lowest Resonance, unloaded 370 Hz
Lowest Resonance, w/ load 30g 310 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel
Dimensions 40x40x30 mm
Wire-Length 1.5 m
Connectors Lemosa DSub
Operating Temperature -20.. 80 °C

Options

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Drivers, open-loop, EBO-060100
  • Suitable Controller, closed-loop, EBD-060320

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