L3C XYZ-Stages, 100 µm, Aperture

L3C-D10100 stages are made for fastest scanning and tracking. The positioning-range for X and Y is 100 μm. These stages are ideal for atomic-force and near-field microscopy. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.

  • XY 100×100 µm
  • Z 20/50/100 µm
  • Scanning Stages, high dynamics
Product-Number, L3C-D10100-.. XY100Z20 XY100Z50 XY100Z100 Unit
Position-Sensors Capacitive (Cap)
Ranges, closed loop 100/100/20 100/100/50 100/100/100 µm
Ranges, open loop (-45..+180V) 140/140/24 140/140/60 140/140/120 µm
Resolution, closed loop, XY/Z 0.5/0.1 0.5/0.3 0.5 nm
Linearity, XY/Z 0.02/0.07 %
Repeatability, XY/Z 5/2 5/3 5 nm
Resonance, XY, unloaded 1100 Hz
Resonance, Z, unloaded 1200 760 730 Hz
El. Capacitance @ 1Veff 1kHz XY13.2/Z4.4 XY13.2/Z4.4 XY13.2/Z8.8 µF
Dimensions (LxWxH) 150x150x30 mm
Aperture, Dimensions (LxW) 66×66 mm
Body/Platform-Material Aluminum, black
Operating Temperature -20..+80 °C
Connector DSub25
Cable length 1.5 m

Options

  • Vacuum compatibility and/or non-magnetic
  • Suitable controller, EBC-120330

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