- XY 100×100 µm
- Z 20/50/100 µm
- Scanning Stages, high dynamics
| Product-Number, L3C-D10100-.. | XY100Z20 | XY100Z50 | XY100Z100 | Unit |
| Position-Sensors | Capacitive (Cap) | |||
| Ranges, closed loop | 100/100/20 | 100/100/50 | 100/100/100 | µm |
| Ranges, open loop (-45..+180V) | 140/140/24 | 140/140/60 | 140/140/120 | µm |
| Resolution, closed loop, XY/Z | 0.5/0.1 | 0.5/0.3 | 0.5 | nm |
| Linearity, XY/Z | 0.02/0.07 | % | ||
| Repeatability, XY/Z | 5/2 | 5/3 | 5 | nm |
| Resonance, XY, unloaded | 1100 | Hz | ||
| Resonance, Z, unloaded | 1200 | 760 | 730 | Hz |
| El. Capacitance @ 1Veff 1kHz | XY13.2/Z4.4 | XY13.2/Z4.4 | XY13.2/Z8.8 | µF |
| Dimensions (LxWxH) | 150x150x30 | mm | ||
| Aperture, Dimensions (LxW) | 66×66 | mm | ||
| Body/Platform-Material | Aluminum, black | |||
| Operating Temperature | -20..+80 | °C | ||
| Connector | DSub25 | |||
| Cable length | 1.5 | m | ||
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