Wafer-Inspection and Hybrid Bonding
In semiconductor-industries, absolute positioning accuracy and stability in the nanometer-magnitude are decisive.
Most exact adjustment of the wafers and optical focussing at stability for several minutes is required for methods and processes like hybrid bonding, wafer2wafer, wafer2die bonding in maskless lithography (direct imaging), wafer-inspection, metrological applications, advanced packaging,
Our piezo-driven nano-positioning systems grant positioning of wafers and optics at absolute accuracy, which other techniques cannot reach by far. Each step in the process runs repeatably and safely – with resolution of less than nanometers.
Recommended products: L3x-D10300-XY300Z100 and SFC-D20400
Electro-optical wafer-probing in production of PICs and silicon photonics
In the production of photonic integrated circuits (PICs) the time for the adjustment and test of the silicon-photonic components mostly determines efficiency and costs.
The piezo-driven positioning-systems of nanoFaktur deliver nanometer-resolution, high dynamics and playless motion. Thus, optical fibres, wave-guides and chips are being adjusted much faster and more precise, than classic drives can.
In combination with the search/align routines in the firmware of our controllers, throughput and repeatabilty are being raised. A fully automated production is possible. Our piezo-solutions secure scalability, higher yield and lower costs per unit, which are the base for economic mass-production of silicon-photonic parts and PICs.
Advantages:
- nanometer-precise and wearless positioning of fibres, wave-guides and chips
- dynamic scanning and intelligent algorithms for minimized process-time and maximized throughput
- perfect integration into test- and production-setups
Recommended Products: C3S-D00100; C3S-D00600
White Light Interferometry (WLI):
Piezo Systems are ideal tools for WLI, because they
- offer positioning accuracies of nanometer-magnitude,
- can be compact,
- are free of wear and do not need service.
Recommended products: L1C-D00300, SFC-D20400, EBC-060310
Diagnostics and Cell-Analysis
In diagnostics of cancer, the analysis of cells and sequencing of genome require spectroscopic metrology with positioning accuracy in the sub-micron magnitude.
Our compact piezo-systems offer quick and stable movements a minimum space and zero particle emission. Thus, metrology is becoming more reliable, throughput maximized. Processes in production and lab run more efficiently.
Advantages:
- Quicker analysis and higher capacity
- More precise results for reliable data.
- Space-saving integration
Recommended products: SFC-D20400, SFS-D10100
High Resolution Microscopy
In typical high resolution microscopy applications Z-stacks are being recorded, this means hundreds of level-images of the samples. These allow for generation of 3D-models of cell-cultures, enzymes, DNA or other biological specimen.
Our positioning-systems offer nanometer-precise positioning and repeatability. They allow for moving probes, samples or focus-positions at superior accuracy.
Thanks to real-time interfaces and inputs/outputs for trigger signals, cameras or other probes can be easily synchronized. This is especially relevant for confocal 3D-fluorescence imaging, super-resolution microscopy (STED, PALM, SIM) or live-cell imaging with high resolution of time and space.
Advantages:
- nanometer precise z-positioning
- stability for minutes
- flexible motion of probes, lenses or samples
- optimum integration into microscopy-setups (custom designs)
Recommended products: SFC-D20400, SPS-D00600, EBx-060310
