3D-Stages with Aperture

• Ranges to 600 x 600 x 300 µm
• Capacitive or Strain-Sensors
• Versions for Vacuum or nonmagnetic

150 µm Range for SFS-D00100 (new code SFS-D00150)

• Range increased to 150 µm
• Objective-Adapters choosable
• Minimized Body-Size

200 µm Range for SFS-D00150 (new code SFS-D00200)

• Range increased to 200 µm
• Objective-Adapters choosable
• 360° Free Space around Objective

Guidance Precision!

• LPS-Linear-Stage, 500 µm
• Pitch/Yaw <5µrad @ 500 µm
• Measured with our precision autocollimator

Improve your cutting process!

• Oscillation in parallel or perpendicular to cutting edge
• Systems for elliptic oscillations available
• Up to more than 1 kHz
• Up to more than 1 mm (50 Hz)

SFS-HD Load & Dynamics

• Resonance 200 Hz with 200g Objective
• Fast Step-Response
• Fast Scanning

C3S Miniature Stage

• 600x600x500 µm
• for UHV(10^-9 hPa)
• non-magnetic
• feed-throughs

Let us know, if you wish modifications or special designs.