- 1200 µm
- compact
- various adapters
| Product-Code | SFC-D21200 | Unit |
| Position-Sensor | Capacitive | |
| Range, Closed Loop | 1200 | µm |
| Resolution, closed loop | 6 | nm |
| Linearity, closed loop | 0.02 | % |
| Repeatability, 100 µm | 60 | nm |
| Pitch/Yaw | 60 | µrad |
| Push/Pull | 10 | N |
| Load | 150 | g |
| Stiffness | 0.07 | N/µm |
| Resonance, unloaded | 200 | Hz |
| Resonance, w/ 150g load | 100 | Hz |
| Electrical Cap. @ 1V eff, 1kHz | 13 | µF |
| Body-Material | aluminum/stainless-steel | |
| Wire-Length | 1.5 | m |
| Operating Temperature | -20..80 | °C |
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