- 150 µm
- fast
- compact
- various adapters
| Product-Code | SFS-D00150 | Unit |
| Position-Sensor | SGS, Full-Bridge | |
| Range, Closed Loop | 150 | µm |
| Range, Open Loop (0..150 V) | 110 | µm |
| Range, Open Loop (-45..180 V) | 180 | µm |
| Resolution, open loop | 1 | nm |
| Resolution, closed loop | 2 | nm |
| Linearity, closed loop | 0.2 | % |
| Lateral Shift, systematic | 200 | nm |
| Pitch/Yaw | 15 | µrad |
| Repeatability | 15 | nm |
| Push/Pull, maximum | 10/20 | N |
| Lateral Force, maximum | 10 | N |
| Stiffness | 0.5 | N/µm |
| Resonance, with thread-adapter | 620 | Hz |
| Resonance, with 150 g objective | 260 | Hz |
| Elektrical Capacitance @ 1V eff, 1kHz | 3.3 | µF |
| Body-Material | Aluminum/Stainless-Steel | |
| Operating Temperature | -20..80 | °C |
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