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L2C XY-Stages, 100-1200µm

L2C-D0xxxx are compact XY piezo-stages. Ranges go from 100 to 1200 μm. L2C are equipped with capacitive position-sensors for top-precision. The consumption of space is minimized. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion.

  • 100 to 1200 µm
  • capacitive sensors
  • compact
  • ultra precise
Categories: Nano-Positioning, Piezo-Stages 1D-2D-3D, XY-Stages
Product-Number L2C-D00100 L2C-D00300 L2C-D00600 L2C-D01200 Unit
Displacement, closed-loop 100 300 600 1200 µm
Resolution 0.5 1.5 3.0 6 nm
Linearity 0.02 %
Repeatability 5 20 40 80 nm
Pitch/Yaw ±3 ±3 ±6 ±12 µrad
Load 1 kg
Push/Pull 50/20 30/10 N
Stiffness 1.6 0.3 0.15 0.1 N/µm
Resonance, unloaded 900 425 225 150 Hz
El. Cpctnc. /axis @ 1V eff. 1kHz 2.2 3.3 4.4 13.2 µF
Body/Platform-Material stainless steel/aluminum
Operating Temperature -20..80 °C

Options

  • Vacuum-Compatibility
  • Dowel-Pins
  • Suitable controller: EBC-120320

Downloads

Datasheet Drawing
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