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LP_ X/Z-Stages, 45/90 µm, fast

LP_ linear stages are made for fast positioning with highest accuracy. This is achieved by:

  • stainless-steel body
  • symmetric guidance by flexures
  • piezo direct drives

There are two platforms the positioning-object can be mounted on: one on top, the other at front. Best accuracy can be reached by using the front platform, because all relevant components get in line: actuator, guidance, sensor, object.

There are 2 ranges available and 3 versions each with different position metrology:

  • LPO, w/o sensors
  • LPS, w/ strain-gage sensors
  • LPC, w/ capacitive sensors
  • Ranges 45/90 µm
  • Fast
  • 2 Platforms
Categories: Nano-Positioning, Piezo-Stages 1D-2D-3D, X-Stages
Product-Number LP_-_00045 LP_-_00090 Unit
Displacement (0..150 V) 45 90 µm
Displacement (-45..180 V) 72 143 µm
Resolution, LPO and open loop
Resolution, LPS
Resolution, LPC		 0.2
1
0.3		 0.4
2
0.5		 nm
Linearity, LPS
Linearity, LPC		 0.2
0.02		 0.2
0.02		 %
Repeatability, LPS
Repeatability, LPC		 5
4		 10
8		 nm
Push/Pull 200/25 200/25 N
Stiffness 21 10 N/µm
Resonance, unloaded 3,000 2,000 Hz
El. Capacitance @ 1V eff. 1kHz 3.3 6.6 µF
Body-Material stainless steel
El. Connectors LPO: Lemosa
LPS and LPC: DSub15
Operating Temperature -20..80 °C

Options

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Driver for LPO, EBO-060100
  • Suitable Controller for LPS, EBD-060310
  • Suitable Controller for LPC, EBC-120310

Downloads

Datasheet Drawing
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