3D-Stages with Aperture

• Ranges to 600 x 600 x 300 µm
• Capacitive or Strain-Sensors
• Versions for Vacuum or nonmagnetic

Guidance Precision!

• LPS-Linear-Stage, 500 µm
• Pitch/Yaw <5µrad @ 500 µm
• Measured with our precision autocollimator

Improve your cutting process!

• Oscillation in parallel or perpendicular to cutting edge
• Systems for elliptic oscillations available
• Up to more than 1 kHz
• Up to more than 1 mm (50 Hz)

C3S Miniature Stage

• 600x600x500 µm
• for UHV(10^-9 hPa)
• non-magnetic
• feed-throughs

Let us know, if you wish modifications or special designs.