C2a XY-Stages, 250 µm

  • >300×300 µm
  • Size 40x40x30 mm
  • Non-Magn. availbl.
Product-Number C2O-L00250 C2S-D00250 Unit
Position-Sensor SGS
Range (-45..180 V) 330×330 330×330 µm
Range, closed loop 250×250 µm
Resolution, open loop 1 1 nm
Resolution, closed loop 3 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 25 nm
Systematic Crosstalk 900 nm
Load 150 g
Push/Pull 15/10 N
Stiffness 0.4 N/µm
Lowest Resonance, unloaded 210 Hz
Lowest Resonance, w/ load 30g 190 Hz
El. Capacitance @ 1V eff. 1kHz 2.2/axis µF
Body-Material aluminum, stainless steel
Dimensions 40x40x30 mm
Wire Length 1.5 m
Connectors Lemosa DSub
Operating Temperature -20.. 80 °C

Options

  • Vacuum-Compatibility
  • Non-Magnetic Versions
  • Suitable Drivers, open-loop, EBO-060100
  • Suitable Controller, closed-loop, EBD-060320

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