- Range 500 µm
- Size 60x60x29 mm
| Product-Code | CPO-L00500 | CPS-D00500 | Unit |
| Position-Sensor | – | SGS, Full-Bridge | |
| Range, Open Loop (-45..180 V) | 600 | 600 | µm |
| Range, Closed Loop | – | 500 | µm |
| Resolution, open loop | 3 | 3 | nm |
| Resolution, closed loop | – | 5 | nm |
| Linearity, closed loop | – | 0.2 | % |
| Repeatability | – | 50 | nm |
| Push/Pull, maximum | 40/20 | N | |
| Lateral Force, maximum | 10 | N | |
| Stiffness | 0.15 | N/µm | |
| Resonance, unloaded | 260 | Hz | |
| Resonance, with 100 g load | 180 | Hz | |
| Electrical Capacitance @ 1V eff, 1kHz | 4.4 | µF | |
| Body-Material | aluminum/stainless-steel | ||
| Connector | Lemo | DSub15 | |
| Operating Temperature | -20..+80 | °C | |
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