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L2_ XY-Stages, 300-600µm, Aperture

L2C and L2S Stages are made for scanning. The positioning-ranges are 300 or 600 μm. L2C is equipped with capacitive position-sensors for top-precision. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2C and L2S stages are also available with integrated Z-axes and there is a high-dynamic version.

  • 300 or 600 µm
  • capacitive or strain sensors
  • large aperture
  • scanning stage
Categories: Nano-Positioning, Piezo-Stages 1D-2D-3D, XY-Stages
Product-Number L2_-D10300 L2_-D10600 Unit
Position-Sensors L2C capacitive (cap), L2S strain sensors (SGS)
Ranges XY, closed loop 300×300 600×600 µm
Resolution, LPC

Resolution, LPS

 1.5

4

 3

9

 nm
Linearity, LPC

Linearity, LPS

 0.02

0.2

 %
Repeatability, LPC

Repeatability, LPS

 15

30

 30

60

 nm
Resonance, unloaded 210 175 Hz
El. Capacitance @ 1Veff 1kHz 13.2 µF
Dimensions (LxWxH) 150x150x30 mm
Aperture, Dimensions (LxW) 66×66 mm
Body/Platform-Material Aluminum, black
Operating Temperature -20.. 80 °C
Connector DSub25
Cable length 1.5 mm

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