- 1×1 mm
- large aperture
- high-dynamics
| Product-Code | L2S-D01000 | Unit |
| Position-Sensor | SGS, Full-Bridge | |
| Range, Closed Loop | 1000 | µm |
| Range, Open Loop (0..150 V) | 1000 | µm |
| Range, Open Loop (-45..180 V) | 1600 | µm |
| Resolution, open loop | 5 | nm |
| Resolution, closed loop | 10 | nm |
| Linearity, closed loop | 0.2 | % |
| Repeatability | 50 | nm |
| Push/Pull | 10 | N |
| Load | 0.2 | kg |
| Lateral Force | 10 | N |
| Stiffness | 0.2 | N/µm |
| Resonance, unloaded | 105 | Hz |
| Resonance, with 200 g load | 80 | Hz |
| Electrical Capacitance @ 1V eff, 1kHz | 19.8/axis | µF |
| Body-Material | Aluminum/Stainless-Steel | |
| Operating Temperature | -20..80 | °C |
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