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L3_ XYZ-Stages, 300 µm, Aperture

L3C- and L3S-Stages are made for scanning and tracking. The basic positioning-range for X and Y is 300 μm. These stages are ideal for atomic-force and near-field microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.

  • XY 300×300 µm
  • Z 20/50/100/300 µm
  • Scanning Stages
Categories: Nano-Positioning, Piezo-Stages 1D-2D-3D, XYZ-Stages
Product-Number. L3_D10300-.. XY300Z20 XY300Z50 XY300Z100 XY300Z300 Unit
Position-Sensors capacitive sensors (L3C). strain sensors (L3S)
Ranges, closed loop 300/300/20 300/300/50 300/300/100 300/300/300 µm
Ranges, open loop (-45.. 180V) 480/480/24 480/480/60 480/480/120 480/480/360 µm
Resolution, L3C

Resolution, L3S

 1.5/0.1

1.5/0.5

 1.5/0.1.5

1.5/1

 1.5/0.5

1.5/1

 1.5/1.5

1.5/1.5

 nm
Linearity, L3C, XY/Z

Linearity, L3S

 0.02/0.07

0.2

 %
Repeatability, L3C

Repeatabilty, L3S

 15/1

30/2

 15/3

30/5

 15/5

30/10

 15/15

30/30

 nm
Resonance XY, unloaded 185 Hz
Resonance, Z, unloaded 680 600 580 450 Hz
El. Capacitance @ 1Veff 1kHz XY13.2/Z4.4 XY13.2/Z8.8 XY13.2/Z13.2 µF
Dimensions (LxWxH) 150x150x30 mm
Aperture, Dimensions (LxW) 66×66 mm
Body/Platform-Material Aluminum. black anodized
Operating Temperature -20.. 80 °C
Connector DSub25
Cable length 1.5 m

Options

  • Vacuum compatibility and/or non-magnetic
  • Suitable controller, LPC, EBC-120330
  • Suitable controller, LPS, EBD-060330

Downloads

Datasheet Drawing
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